3/18/2011	7:29:35 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/18/2011	7:29:36 AM	Recipe started at 7:29 AM
3/18/2011	7:29:36 AM	H2 valve closed
3/18/2011	7:29:36 AM	BCl3 valve closed
3/18/2011	7:29:36 AM	PH3 valve closed
3/18/2011	7:29:36 AM	SiCl4 pre valve closed
3/18/2011	7:29:36 AM	SiCl4 post valve closed
3/18/2011	7:29:36 AM	Main Vac valve closed
3/18/2011	7:29:36 AM	Bypass valve closed
3/18/2011	7:29:36 AM	Bubbler valve closed
3/18/2011	7:29:36 AM	Helium valve opened
3/18/2011	7:29:36 AM	Helium MFC set to  500.000000
3/18/2011	7:29:36 AM	H2 MFC set to  0.000000
3/18/2011	7:29:36 AM	BCl3 MFC set to  0.000000
3/18/2011	7:29:36 AM	PHl3 MFC set to  0.000000
3/18/2011	7:29:36 AM	SiCl4 MFC set to  0.000000
3/18/2011	7:29:36 AM	Bypass solenoid MFC set to  0.000000
3/18/2011	7:29:36 AM	Tube furnace set to 0
3/18/2011	7:30:56 AM	Helium valve closed
3/18/2011	7:30:56 AM	H2 valve closed
3/18/2011	7:30:56 AM	BCl3 valve closed
3/18/2011	7:30:56 AM	PH3 valve closed
3/18/2011	7:30:56 AM	SiCl4 pre valve closed
3/18/2011	7:30:56 AM	SiCl4 post valve closed
3/18/2011	7:30:56 AM	Main Vac valve closed
3/18/2011	7:30:56 AM	Bypass valve closed
3/18/2011	7:30:56 AM	Bubbler valve closed
3/18/2011	7:30:56 AM	Helium MFC set to  0.000000
3/18/2011	7:30:56 AM	H2 MFC set to  0.000000
3/18/2011	7:30:56 AM	BCl3 MFC set to  0.000000
3/18/2011	7:30:56 AM	PHl3 MFC set to  0.000000
3/18/2011	7:30:56 AM	SiCl4 MFC set to  0.000000
3/18/2011	7:30:56 AM	Bypass solenoid MFC set to  0.000000
3/18/2011	7:30:57 AM	Tube furnace set to 0
3/18/2011	7:30:57 AM	Run finished at 7:30 AM
3/18/2011	7:30:57 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/18/2011	7:36:39 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/18/2011	7:36:40 AM	Recipe started at 7:36 AM
3/18/2011	7:36:40 AM	Helium valve closed
3/18/2011	7:36:40 AM	H2 valve closed
3/18/2011	7:36:40 AM	BCl3 valve closed
3/18/2011	7:36:40 AM	PH3 valve closed
3/18/2011	7:36:40 AM	SiCl4 pre valve closed
3/18/2011	7:36:40 AM	SiCl4 post valve closed
3/18/2011	7:36:40 AM	Main Vac valve closed
3/18/2011	7:36:40 AM	Bubbler valve closed
3/18/2011	7:36:40 AM	Bypass valve opened
3/18/2011	7:36:40 AM	Helium MFC set to  0.000000
3/18/2011	7:36:40 AM	H2 MFC set to  0.000000
3/18/2011	7:36:40 AM	BCl3 MFC set to  0.000000
3/18/2011	7:36:40 AM	PHl3 MFC set to  0.000000
3/18/2011	7:36:40 AM	SiCl4 MFC set to  0.000000
3/18/2011	7:36:40 AM	Bypass solenoid MFC set to  0.000000
3/18/2011	7:36:40 AM	Tube furnace set to 0
3/18/2011	7:37:11 AM	Helium valve closed
3/18/2011	7:37:11 AM	H2 valve closed
3/18/2011	7:37:11 AM	BCl3 valve closed
3/18/2011	7:37:11 AM	PH3 valve closed
3/18/2011	7:37:11 AM	SiCl4 pre valve closed
3/18/2011	7:37:11 AM	SiCl4 post valve closed
3/18/2011	7:37:11 AM	Bubbler valve closed
3/18/2011	7:37:11 AM	Main Vac valve opened
3/18/2011	7:37:11 AM	Bypass valve opened
3/18/2011	7:37:11 AM	Helium MFC set to  0.000000
3/18/2011	7:37:11 AM	H2 MFC set to  0.000000
3/18/2011	7:37:11 AM	BCl3 MFC set to  0.000000
3/18/2011	7:37:11 AM	PHl3 MFC set to  0.000000
3/18/2011	7:37:11 AM	SiCl4 MFC set to  0.000000
3/18/2011	7:37:11 AM	Bypass solenoid MFC set to  0.000000
3/18/2011	7:37:11 AM	Tube furnace set to 0
3/18/2011	7:37:11 AM	Run finished at 7:37 AM
3/18/2011	7:37:11 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/18/2011	8:38:26 AM	Recipe started at 8:38 AM
3/18/2011	8:38:26 AM	Helium valve closed
3/18/2011	8:38:26 AM	BCl3 valve closed
3/18/2011	8:38:26 AM	PH3 valve closed
3/18/2011	8:38:26 AM	SiCl4 pre valve closed
3/18/2011	8:38:26 AM	SiCl4 post valve closed
3/18/2011	8:38:26 AM	Main Vac valve closed
3/18/2011	8:38:26 AM	Bypass valve closed
3/18/2011	8:38:26 AM	Bubbler valve closed
3/18/2011	8:38:26 AM	H2 valve opened
3/18/2011	8:38:26 AM	Helium MFC set to  0.000000
3/18/2011	8:38:26 AM	H2 MFC set to  500.000000
3/18/2011	8:38:26 AM	BCl3 MFC set to  0.000000
3/18/2011	8:38:26 AM	PHl3 MFC set to  0.000000
3/18/2011	8:38:26 AM	SiCl4 MFC set to  0.000000
3/18/2011	8:38:26 AM	Bypass solenoid MFC set to  0.000000
3/18/2011	8:38:27 AM	Tube furnace set to 0
3/18/2011	8:39:49 AM	Helium valve closed
3/18/2011	8:39:49 AM	BCl3 valve closed
3/18/2011	8:39:49 AM	PH3 valve closed
3/18/2011	8:39:49 AM	SiCl4 pre valve closed
3/18/2011	8:39:49 AM	SiCl4 post valve closed
3/18/2011	8:39:49 AM	Main Vac valve closed
3/18/2011	8:39:49 AM	Bypass valve closed
3/18/2011	8:39:49 AM	H2 valve opened
3/18/2011	8:39:49 AM	Bubbler valve opened
3/18/2011	8:39:49 AM	Helium MFC set to  0.000000
3/18/2011	8:39:49 AM	H2 MFC set to  500.000000
3/18/2011	8:39:49 AM	BCl3 MFC set to  0.000000
3/18/2011	8:39:49 AM	PHl3 MFC set to  0.000000
3/18/2011	8:39:49 AM	SiCl4 MFC set to  0.000000
3/18/2011	8:39:49 AM	Bypass solenoid MFC set to  0.000000
3/18/2011	8:39:50 AM	Tube furnace set to 1000
3/18/2011	8:59:50 AM	Helium valve closed
3/18/2011	8:59:50 AM	PH3 valve closed
3/18/2011	8:59:50 AM	Main Vac valve closed
3/18/2011	8:59:50 AM	Bypass valve closed
3/18/2011	8:59:50 AM	H2 valve opened
3/18/2011	8:59:50 AM	BCl3 valve opened
3/18/2011	8:59:50 AM	SiCl4 pre valve opened
3/18/2011	8:59:50 AM	SiCl4 post valve opened
3/18/2011	8:59:50 AM	Bubbler valve opened
3/18/2011	8:59:50 AM	Helium MFC set to  0.000000
3/18/2011	8:59:50 AM	H2 MFC set to  500.000000
3/18/2011	8:59:50 AM	BCl3 MFC set to  3.000000
3/18/2011	8:59:50 AM	PHl3 MFC set to  0.000000
3/18/2011	8:59:50 AM	SiCl4 MFC set to  50.000000
3/18/2011	8:59:50 AM	Bypass solenoid MFC set to  0.000000
3/18/2011	8:59:50 AM	Tube furnace set to 1000
3/18/2011	9:14:50 AM	H2 valve closed
3/18/2011	9:14:50 AM	BCl3 valve closed
3/18/2011	9:14:50 AM	PH3 valve closed
3/18/2011	9:14:50 AM	SiCl4 pre valve closed
3/18/2011	9:14:50 AM	SiCl4 post valve closed
3/18/2011	9:14:50 AM	Main Vac valve closed
3/18/2011	9:14:50 AM	Bypass valve closed
3/18/2011	9:14:50 AM	Helium valve opened
3/18/2011	9:14:50 AM	Bubbler valve opened
3/18/2011	9:14:50 AM	Helium MFC set to  500.000000
3/18/2011	9:14:50 AM	H2 MFC set to  0.000000
3/18/2011	9:14:50 AM	BCl3 MFC set to  0.000000
3/18/2011	9:14:50 AM	PHl3 MFC set to  0.000000
3/18/2011	9:14:50 AM	SiCl4 MFC set to  0.000000
3/18/2011	9:14:50 AM	Bypass solenoid MFC set to  0.000000
3/18/2011	9:14:50 AM	Tube furnace set to 0
3/18/2011	9:34:50 AM	Helium valve closed
3/18/2011	9:34:50 AM	H2 valve closed
3/18/2011	9:34:50 AM	BCl3 valve closed
3/18/2011	9:34:50 AM	PH3 valve closed
3/18/2011	9:34:50 AM	SiCl4 pre valve closed
3/18/2011	9:34:50 AM	SiCl4 post valve closed
3/18/2011	9:34:50 AM	Main Vac valve closed
3/18/2011	9:34:50 AM	Bypass valve closed
3/18/2011	9:34:50 AM	Bubbler valve closed
3/18/2011	9:34:50 AM	Helium MFC set to  0.000000
3/18/2011	9:34:50 AM	H2 MFC set to  0.000000
3/18/2011	9:34:50 AM	BCl3 MFC set to  0.000000
3/18/2011	9:34:50 AM	PHl3 MFC set to  0.000000
3/18/2011	9:34:50 AM	SiCl4 MFC set to  0.000000
3/18/2011	9:34:50 AM	Bypass solenoid MFC set to  0.000000
3/18/2011	9:34:50 AM	Tube furnace set to 0
3/18/2011	9:34:50 AM	Run finished at 9:34 AM
3/18/2011	9:49:05 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/18/2011	9:49:05 AM	Recipe started at 9:49 AM
3/18/2011	9:49:05 AM	H2 valve closed
3/18/2011	9:49:05 AM	BCl3 valve closed
3/18/2011	9:49:05 AM	PH3 valve closed
3/18/2011	9:49:05 AM	SiCl4 pre valve closed
3/18/2011	9:49:05 AM	SiCl4 post valve closed
3/18/2011	9:49:05 AM	Main Vac valve closed
3/18/2011	9:49:05 AM	Bypass valve closed
3/18/2011	9:49:05 AM	Bubbler valve closed
3/18/2011	9:49:05 AM	Helium valve opened
3/18/2011	9:49:05 AM	Helium MFC set to  500.000000
3/18/2011	9:49:05 AM	H2 MFC set to  0.000000
3/18/2011	9:49:05 AM	BCl3 MFC set to  0.000000
3/18/2011	9:49:05 AM	PHl3 MFC set to  0.000000
3/18/2011	9:49:05 AM	SiCl4 MFC set to  0.000000
3/18/2011	9:49:05 AM	Bypass solenoid MFC set to  0.000000
3/18/2011	9:49:05 AM	Tube furnace set to 0
3/18/2011	9:49:09 AM	Helium valve closed
3/18/2011	9:49:09 AM	H2 valve closed
3/18/2011	9:49:09 AM	BCl3 valve closed
3/18/2011	9:49:09 AM	PH3 valve closed
3/18/2011	9:49:09 AM	SiCl4 pre valve closed
3/18/2011	9:49:09 AM	SiCl4 post valve closed
3/18/2011	9:49:09 AM	Main Vac valve closed
3/18/2011	9:49:09 AM	Bypass valve closed
3/18/2011	9:49:09 AM	Bubbler valve closed
3/18/2011	9:49:09 AM	Helium MFC set to  0.000000
3/18/2011	9:49:09 AM	H2 MFC set to  0.000000
3/18/2011	9:49:09 AM	BCl3 MFC set to  0.000000
3/18/2011	9:49:09 AM	PHl3 MFC set to  0.000000
3/18/2011	9:49:09 AM	SiCl4 MFC set to  0.000000
3/18/2011	9:49:09 AM	Bypass solenoid MFC set to  0.000000
3/18/2011	9:49:09 AM	Tube furnace set to 0
3/18/2011	9:49:09 AM	Run finished at 9:49 AM
3/18/2011	9:49:09 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/18/2011	9:53:29 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/18/2011	9:53:30 AM	Recipe started at 9:53 AM
3/18/2011	9:53:30 AM	Helium valve closed
3/18/2011	9:53:30 AM	H2 valve closed
3/18/2011	9:53:30 AM	BCl3 valve closed
3/18/2011	9:53:30 AM	PH3 valve closed
3/18/2011	9:53:30 AM	SiCl4 pre valve closed
3/18/2011	9:53:30 AM	SiCl4 post valve closed
3/18/2011	9:53:30 AM	Main Vac valve closed
3/18/2011	9:53:30 AM	Bubbler valve closed
3/18/2011	9:53:30 AM	Bypass valve opened
3/18/2011	9:53:30 AM	Helium MFC set to  0.000000
3/18/2011	9:53:30 AM	H2 MFC set to  0.000000
3/18/2011	9:53:30 AM	BCl3 MFC set to  0.000000
3/18/2011	9:53:30 AM	PHl3 MFC set to  0.000000
3/18/2011	9:53:30 AM	SiCl4 MFC set to  0.000000
3/18/2011	9:53:30 AM	Bypass solenoid MFC set to  0.000000
3/18/2011	9:53:30 AM	Tube furnace set to 0
3/18/2011	9:54:02 AM	Helium valve closed
3/18/2011	9:54:02 AM	H2 valve closed
3/18/2011	9:54:02 AM	BCl3 valve closed
3/18/2011	9:54:02 AM	PH3 valve closed
3/18/2011	9:54:02 AM	SiCl4 pre valve closed
3/18/2011	9:54:02 AM	SiCl4 post valve closed
3/18/2011	9:54:02 AM	Bubbler valve closed
3/18/2011	9:54:02 AM	Main Vac valve opened
3/18/2011	9:54:02 AM	Bypass valve opened
3/18/2011	9:54:02 AM	Helium MFC set to  0.000000
3/18/2011	9:54:02 AM	H2 MFC set to  0.000000
3/18/2011	9:54:02 AM	BCl3 MFC set to  0.000000
3/18/2011	9:54:02 AM	PHl3 MFC set to  0.000000
3/18/2011	9:54:02 AM	SiCl4 MFC set to  0.000000
3/18/2011	9:54:02 AM	Bypass solenoid MFC set to  0.000000
3/18/2011	9:54:02 AM	Tube furnace set to 0
3/18/2011	9:54:02 AM	Run finished at 9:54 AM
3/18/2011	9:54:02 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/18/2011	11:03:03 AM	Recipe started at 11:03 AM
3/18/2011	11:03:04 AM	Helium valve closed
3/18/2011	11:03:04 AM	BCl3 valve closed
3/18/2011	11:03:04 AM	PH3 valve closed
3/18/2011	11:03:04 AM	SiCl4 pre valve closed
3/18/2011	11:03:04 AM	SiCl4 post valve closed
3/18/2011	11:03:04 AM	Main Vac valve closed
3/18/2011	11:03:04 AM	Bypass valve closed
3/18/2011	11:03:04 AM	Bubbler valve closed
3/18/2011	11:03:04 AM	H2 valve opened
3/18/2011	11:03:04 AM	Helium MFC set to  0.000000
3/18/2011	11:03:04 AM	H2 MFC set to  500.000000
3/18/2011	11:03:04 AM	BCl3 MFC set to  0.000000
3/18/2011	11:03:04 AM	PHl3 MFC set to  0.000000
3/18/2011	11:03:04 AM	SiCl4 MFC set to  0.000000
3/18/2011	11:03:04 AM	Bypass solenoid MFC set to  0.000000
3/18/2011	11:03:04 AM	Tube furnace set to 0
3/18/2011	11:04:23 AM	Helium valve closed
3/18/2011	11:04:23 AM	BCl3 valve closed
3/18/2011	11:04:23 AM	PH3 valve closed
3/18/2011	11:04:23 AM	SiCl4 pre valve closed
3/18/2011	11:04:23 AM	SiCl4 post valve closed
3/18/2011	11:04:23 AM	Main Vac valve closed
3/18/2011	11:04:23 AM	Bypass valve closed
3/18/2011	11:04:23 AM	H2 valve opened
3/18/2011	11:04:23 AM	Bubbler valve opened
3/18/2011	11:04:23 AM	Helium MFC set to  0.000000
3/18/2011	11:04:23 AM	H2 MFC set to  500.000000
3/18/2011	11:04:23 AM	BCl3 MFC set to  0.000000
3/18/2011	11:04:23 AM	PHl3 MFC set to  0.000000
3/18/2011	11:04:23 AM	SiCl4 MFC set to  0.000000
3/18/2011	11:04:23 AM	Bypass solenoid MFC set to  0.000000
3/18/2011	11:04:23 AM	Tube furnace set to 1000
3/18/2011	11:24:23 AM	Helium valve closed
3/18/2011	11:24:23 AM	PH3 valve closed
3/18/2011	11:24:23 AM	Main Vac valve closed
3/18/2011	11:24:23 AM	Bypass valve closed
3/18/2011	11:24:23 AM	H2 valve opened
3/18/2011	11:24:23 AM	BCl3 valve opened
3/18/2011	11:24:23 AM	SiCl4 pre valve opened
3/18/2011	11:24:23 AM	SiCl4 post valve opened
3/18/2011	11:24:23 AM	Bubbler valve opened
3/18/2011	11:24:23 AM	Helium MFC set to  0.000000
3/18/2011	11:24:23 AM	H2 MFC set to  500.000000
3/18/2011	11:24:23 AM	BCl3 MFC set to  3.000000
3/18/2011	11:24:23 AM	PHl3 MFC set to  0.000000
3/18/2011	11:24:23 AM	SiCl4 MFC set to  50.000000
3/18/2011	11:24:23 AM	Bypass solenoid MFC set to  0.000000
3/18/2011	11:24:23 AM	Tube furnace set to 1000
3/18/2011	11:39:23 AM	H2 valve closed
3/18/2011	11:39:23 AM	BCl3 valve closed
3/18/2011	11:39:23 AM	PH3 valve closed
3/18/2011	11:39:23 AM	SiCl4 pre valve closed
3/18/2011	11:39:23 AM	SiCl4 post valve closed
3/18/2011	11:39:23 AM	Main Vac valve closed
3/18/2011	11:39:23 AM	Bypass valve closed
3/18/2011	11:39:23 AM	Helium valve opened
3/18/2011	11:39:23 AM	Bubbler valve opened
3/18/2011	11:39:23 AM	Helium MFC set to  500.000000
3/18/2011	11:39:23 AM	H2 MFC set to  0.000000
3/18/2011	11:39:23 AM	BCl3 MFC set to  0.000000
3/18/2011	11:39:23 AM	PHl3 MFC set to  0.000000
3/18/2011	11:39:23 AM	SiCl4 MFC set to  0.000000
3/18/2011	11:39:23 AM	Bypass solenoid MFC set to  0.000000
3/18/2011	11:39:23 AM	Tube furnace set to 0
3/18/2011	11:59:23 AM	Helium valve closed
3/18/2011	11:59:23 AM	H2 valve closed
3/18/2011	11:59:23 AM	BCl3 valve closed
3/18/2011	11:59:23 AM	PH3 valve closed
3/18/2011	11:59:23 AM	SiCl4 pre valve closed
3/18/2011	11:59:23 AM	SiCl4 post valve closed
3/18/2011	11:59:23 AM	Main Vac valve closed
3/18/2011	11:59:23 AM	Bypass valve closed
3/18/2011	11:59:23 AM	Bubbler valve closed
3/18/2011	11:59:23 AM	Helium MFC set to  0.000000
3/18/2011	11:59:23 AM	H2 MFC set to  0.000000
3/18/2011	11:59:23 AM	BCl3 MFC set to  0.000000
3/18/2011	11:59:23 AM	PHl3 MFC set to  0.000000
3/18/2011	11:59:23 AM	SiCl4 MFC set to  0.000000
3/18/2011	11:59:23 AM	Bypass solenoid MFC set to  0.000000
3/18/2011	11:59:23 AM	Tube furnace set to 0
3/18/2011	11:59:24 AM	Run finished at 11:59 AM
3/18/2011	12:04:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/18/2011	12:04:42 PM	Recipe started at 12:04 PM
3/18/2011	12:04:42 PM	H2 valve closed
3/18/2011	12:04:42 PM	BCl3 valve closed
3/18/2011	12:04:42 PM	PH3 valve closed
3/18/2011	12:04:42 PM	SiCl4 pre valve closed
3/18/2011	12:04:42 PM	SiCl4 post valve closed
3/18/2011	12:04:42 PM	Main Vac valve closed
3/18/2011	12:04:42 PM	Bypass valve closed
3/18/2011	12:04:42 PM	Bubbler valve closed
3/18/2011	12:04:42 PM	Helium valve opened
3/18/2011	12:04:42 PM	Helium MFC set to  500.000000
3/18/2011	12:04:42 PM	H2 MFC set to  0.000000
3/18/2011	12:04:42 PM	BCl3 MFC set to  0.000000
3/18/2011	12:04:42 PM	PHl3 MFC set to  0.000000
3/18/2011	12:04:42 PM	SiCl4 MFC set to  0.000000
3/18/2011	12:04:42 PM	Bypass solenoid MFC set to  0.000000
3/18/2011	12:04:42 PM	Tube furnace set to 0
3/18/2011	12:04:45 PM	Helium valve closed
3/18/2011	12:04:45 PM	H2 valve closed
3/18/2011	12:04:45 PM	BCl3 valve closed
3/18/2011	12:04:45 PM	PH3 valve closed
3/18/2011	12:04:45 PM	SiCl4 pre valve closed
3/18/2011	12:04:45 PM	SiCl4 post valve closed
3/18/2011	12:04:45 PM	Main Vac valve closed
3/18/2011	12:04:45 PM	Bypass valve closed
3/18/2011	12:04:45 PM	Bubbler valve closed
3/18/2011	12:04:45 PM	Helium MFC set to  0.000000
3/18/2011	12:04:45 PM	H2 MFC set to  0.000000
3/18/2011	12:04:45 PM	BCl3 MFC set to  0.000000
3/18/2011	12:04:45 PM	PHl3 MFC set to  0.000000
3/18/2011	12:04:45 PM	SiCl4 MFC set to  0.000000
3/18/2011	12:04:45 PM	Bypass solenoid MFC set to  0.000000
3/18/2011	12:04:45 PM	Tube furnace set to 0
3/18/2011	12:04:45 PM	Run finished at 12:04 PM
3/18/2011	12:04:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/18/2011	12:09:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/18/2011	12:09:36 PM	Recipe started at 12:09 PM
3/18/2011	12:09:36 PM	Helium valve closed
3/18/2011	12:09:36 PM	H2 valve closed
3/18/2011	12:09:36 PM	BCl3 valve closed
3/18/2011	12:09:36 PM	PH3 valve closed
3/18/2011	12:09:36 PM	SiCl4 pre valve closed
3/18/2011	12:09:36 PM	SiCl4 post valve closed
3/18/2011	12:09:36 PM	Main Vac valve closed
3/18/2011	12:09:36 PM	Bubbler valve closed
3/18/2011	12:09:36 PM	Bypass valve opened
3/18/2011	12:09:36 PM	Helium MFC set to  0.000000
3/18/2011	12:09:36 PM	H2 MFC set to  0.000000
3/18/2011	12:09:36 PM	BCl3 MFC set to  0.000000
3/18/2011	12:09:36 PM	PHl3 MFC set to  0.000000
3/18/2011	12:09:36 PM	SiCl4 MFC set to  0.000000
3/18/2011	12:09:36 PM	Bypass solenoid MFC set to  0.000000
3/18/2011	12:09:37 PM	Tube furnace set to 0
3/18/2011	12:10:08 PM	Helium valve closed
3/18/2011	12:10:08 PM	H2 valve closed
3/18/2011	12:10:08 PM	BCl3 valve closed
3/18/2011	12:10:08 PM	PH3 valve closed
3/18/2011	12:10:08 PM	SiCl4 pre valve closed
3/18/2011	12:10:08 PM	SiCl4 post valve closed
3/18/2011	12:10:08 PM	Bubbler valve closed
3/18/2011	12:10:08 PM	Main Vac valve opened
3/18/2011	12:10:08 PM	Bypass valve opened
3/18/2011	12:10:08 PM	Helium MFC set to  0.000000
3/18/2011	12:10:08 PM	H2 MFC set to  0.000000
3/18/2011	12:10:08 PM	BCl3 MFC set to  0.000000
3/18/2011	12:10:08 PM	PHl3 MFC set to  0.000000
3/18/2011	12:10:08 PM	SiCl4 MFC set to  0.000000
3/18/2011	12:10:08 PM	Bypass solenoid MFC set to  0.000000
3/18/2011	12:10:08 PM	Tube furnace set to 0
3/18/2011	12:10:09 PM	Run finished at 12:10 PM
3/18/2011	12:10:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/18/2011	1:25:39 PM	Recipe started at 1:25 PM
3/18/2011	1:25:39 PM	Helium valve closed
3/18/2011	1:25:39 PM	BCl3 valve closed
3/18/2011	1:25:39 PM	PH3 valve closed
3/18/2011	1:25:39 PM	SiCl4 pre valve closed
3/18/2011	1:25:39 PM	SiCl4 post valve closed
3/18/2011	1:25:39 PM	Main Vac valve closed
3/18/2011	1:25:39 PM	Bypass valve closed
3/18/2011	1:25:39 PM	Bubbler valve closed
3/18/2011	1:25:39 PM	H2 valve opened
3/18/2011	1:25:39 PM	Helium MFC set to  0.000000
3/18/2011	1:25:39 PM	H2 MFC set to  500.000000
3/18/2011	1:25:39 PM	BCl3 MFC set to  0.000000
3/18/2011	1:25:39 PM	PHl3 MFC set to  0.000000
3/18/2011	1:25:39 PM	SiCl4 MFC set to  0.000000
3/18/2011	1:25:39 PM	Bypass solenoid MFC set to  0.000000
3/18/2011	1:25:40 PM	Tube furnace set to 0
3/18/2011	1:26:58 PM	Helium valve closed
3/18/2011	1:26:58 PM	BCl3 valve closed
3/18/2011	1:26:58 PM	PH3 valve closed
3/18/2011	1:26:58 PM	SiCl4 pre valve closed
3/18/2011	1:26:58 PM	SiCl4 post valve closed
3/18/2011	1:26:58 PM	Main Vac valve closed
3/18/2011	1:26:58 PM	Bypass valve closed
3/18/2011	1:26:58 PM	H2 valve opened
3/18/2011	1:26:58 PM	Bubbler valve opened
3/18/2011	1:26:58 PM	Helium MFC set to  0.000000
3/18/2011	1:26:58 PM	H2 MFC set to  500.000000
3/18/2011	1:26:58 PM	BCl3 MFC set to  0.000000
3/18/2011	1:26:58 PM	PHl3 MFC set to  0.000000
3/18/2011	1:26:58 PM	SiCl4 MFC set to  0.000000
3/18/2011	1:26:58 PM	Bypass solenoid MFC set to  0.000000
3/18/2011	1:26:58 PM	Tube furnace set to 1000
3/18/2011	1:46:58 PM	Helium valve closed
3/18/2011	1:46:58 PM	PH3 valve closed
3/18/2011	1:46:58 PM	Main Vac valve closed
3/18/2011	1:46:58 PM	Bypass valve closed
3/18/2011	1:46:58 PM	H2 valve opened
3/18/2011	1:46:58 PM	BCl3 valve opened
3/18/2011	1:46:58 PM	SiCl4 pre valve opened
3/18/2011	1:46:58 PM	SiCl4 post valve opened
3/18/2011	1:46:58 PM	Bubbler valve opened
3/18/2011	1:46:58 PM	Helium MFC set to  0.000000
3/18/2011	1:46:58 PM	H2 MFC set to  500.000000
3/18/2011	1:46:58 PM	BCl3 MFC set to  3.000000
3/18/2011	1:46:58 PM	PHl3 MFC set to  0.000000
3/18/2011	1:46:58 PM	SiCl4 MFC set to  50.000000
3/18/2011	1:46:58 PM	Bypass solenoid MFC set to  0.000000
3/18/2011	1:46:58 PM	Tube furnace set to 1000
3/18/2011	2:01:58 PM	H2 valve closed
3/18/2011	2:01:58 PM	BCl3 valve closed
3/18/2011	2:01:58 PM	PH3 valve closed
3/18/2011	2:01:58 PM	SiCl4 pre valve closed
3/18/2011	2:01:58 PM	SiCl4 post valve closed
3/18/2011	2:01:58 PM	Main Vac valve closed
3/18/2011	2:01:58 PM	Bypass valve closed
3/18/2011	2:01:58 PM	Helium valve opened
3/18/2011	2:01:58 PM	Bubbler valve opened
3/18/2011	2:01:58 PM	Helium MFC set to  500.000000
3/18/2011	2:01:58 PM	H2 MFC set to  0.000000
3/18/2011	2:01:58 PM	BCl3 MFC set to  0.000000
3/18/2011	2:01:58 PM	PHl3 MFC set to  0.000000
3/18/2011	2:01:58 PM	SiCl4 MFC set to  0.000000
3/18/2011	2:01:58 PM	Bypass solenoid MFC set to  0.000000
3/18/2011	2:01:58 PM	Tube furnace set to 0
3/18/2011	2:21:58 PM	Helium valve closed
3/18/2011	2:21:58 PM	H2 valve closed
3/18/2011	2:21:58 PM	BCl3 valve closed
3/18/2011	2:21:58 PM	PH3 valve closed
3/18/2011	2:21:58 PM	SiCl4 pre valve closed
3/18/2011	2:21:58 PM	SiCl4 post valve closed
3/18/2011	2:21:58 PM	Main Vac valve closed
3/18/2011	2:21:58 PM	Bypass valve closed
3/18/2011	2:21:58 PM	Bubbler valve closed
3/18/2011	2:21:58 PM	Helium MFC set to  0.000000
3/18/2011	2:21:58 PM	H2 MFC set to  0.000000
3/18/2011	2:21:58 PM	BCl3 MFC set to  0.000000
3/18/2011	2:21:58 PM	PHl3 MFC set to  0.000000
3/18/2011	2:21:58 PM	SiCl4 MFC set to  0.000000
3/18/2011	2:21:58 PM	Bypass solenoid MFC set to  0.000000
3/18/2011	2:21:58 PM	Tube furnace set to 0
3/18/2011	2:21:59 PM	Run finished at 2:21 PM
3/18/2011	2:53:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/18/2011	2:53:46 PM	Recipe started at 2:53 PM
3/18/2011	2:53:46 PM	Helium valve closed
3/18/2011	2:53:46 PM	H2 valve closed
3/18/2011	2:53:46 PM	BCl3 valve closed
3/18/2011	2:53:46 PM	PH3 valve closed
3/18/2011	2:53:46 PM	SiCl4 pre valve closed
3/18/2011	2:53:46 PM	SiCl4 post valve closed
3/18/2011	2:53:46 PM	Main Vac valve closed
3/18/2011	2:53:46 PM	Bubbler valve closed
3/18/2011	2:53:46 PM	Bypass valve opened
3/18/2011	2:53:46 PM	Helium MFC set to  0.000000
3/18/2011	2:53:46 PM	H2 MFC set to  0.000000
3/18/2011	2:53:46 PM	BCl3 MFC set to  0.000000
3/18/2011	2:53:46 PM	PHl3 MFC set to  0.000000
3/18/2011	2:53:46 PM	SiCl4 MFC set to  0.000000
3/18/2011	2:53:46 PM	Bypass solenoid MFC set to  0.000000
3/18/2011	2:53:46 PM	Tube furnace set to 0
3/18/2011	2:54:19 PM	Helium valve closed
3/18/2011	2:54:19 PM	H2 valve closed
3/18/2011	2:54:19 PM	BCl3 valve closed
3/18/2011	2:54:19 PM	PH3 valve closed
3/18/2011	2:54:19 PM	SiCl4 pre valve closed
3/18/2011	2:54:19 PM	SiCl4 post valve closed
3/18/2011	2:54:19 PM	Bubbler valve closed
3/18/2011	2:54:19 PM	Main Vac valve opened
3/18/2011	2:54:19 PM	Bypass valve opened
3/18/2011	2:54:19 PM	Helium MFC set to  0.000000
3/18/2011	2:54:19 PM	H2 MFC set to  0.000000
3/18/2011	2:54:19 PM	BCl3 MFC set to  0.000000
3/18/2011	2:54:19 PM	PHl3 MFC set to  0.000000
3/18/2011	2:54:19 PM	SiCl4 MFC set to  0.000000
3/18/2011	2:54:19 PM	Bypass solenoid MFC set to  0.000000
3/18/2011	2:54:19 PM	Tube furnace set to 0
3/18/2011	2:54:19 PM	Run finished at 2:54 PM
3/18/2011	2:54:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/18/2011	3:51:38 PM	Recipe started at 3:51 PM
3/18/2011	3:51:38 PM	Helium valve closed
3/18/2011	3:51:38 PM	BCl3 valve closed
3/18/2011	3:51:38 PM	PH3 valve closed
3/18/2011	3:51:38 PM	SiCl4 pre valve closed
3/18/2011	3:51:38 PM	SiCl4 post valve closed
3/18/2011	3:51:38 PM	Main Vac valve closed
3/18/2011	3:51:38 PM	Bypass valve closed
3/18/2011	3:51:38 PM	Bubbler valve closed
3/18/2011	3:51:38 PM	H2 valve opened
3/18/2011	3:51:38 PM	Helium MFC set to  0.000000
3/18/2011	3:51:38 PM	H2 MFC set to  500.000000
3/18/2011	3:51:38 PM	BCl3 MFC set to  0.000000
3/18/2011	3:51:38 PM	PHl3 MFC set to  0.000000
3/18/2011	3:51:38 PM	SiCl4 MFC set to  0.000000
3/18/2011	3:51:38 PM	Bypass solenoid MFC set to  0.000000
3/18/2011	3:51:38 PM	Tube furnace set to 0
3/18/2011	3:52:58 PM	Helium valve closed
3/18/2011	3:52:58 PM	BCl3 valve closed
3/18/2011	3:52:58 PM	PH3 valve closed
3/18/2011	3:52:58 PM	SiCl4 pre valve closed
3/18/2011	3:52:58 PM	SiCl4 post valve closed
3/18/2011	3:52:58 PM	Main Vac valve closed
3/18/2011	3:52:58 PM	Bypass valve closed
3/18/2011	3:52:58 PM	H2 valve opened
3/18/2011	3:52:58 PM	Bubbler valve opened
3/18/2011	3:52:58 PM	Helium MFC set to  0.000000
3/18/2011	3:52:58 PM	H2 MFC set to  500.000000
3/18/2011	3:52:58 PM	BCl3 MFC set to  0.000000
3/18/2011	3:52:58 PM	PHl3 MFC set to  0.000000
3/18/2011	3:52:58 PM	SiCl4 MFC set to  0.000000
3/18/2011	3:52:58 PM	Bypass solenoid MFC set to  0.000000
3/18/2011	3:52:58 PM	Tube furnace set to 1000
3/18/2011	4:12:58 PM	Helium valve closed
3/18/2011	4:12:58 PM	PH3 valve closed
3/18/2011	4:12:58 PM	Main Vac valve closed
3/18/2011	4:12:58 PM	Bypass valve closed
3/18/2011	4:12:58 PM	H2 valve opened
3/18/2011	4:12:58 PM	BCl3 valve opened
3/18/2011	4:12:58 PM	SiCl4 pre valve opened
3/18/2011	4:12:58 PM	SiCl4 post valve opened
3/18/2011	4:12:58 PM	Bubbler valve opened
3/18/2011	4:12:58 PM	Helium MFC set to  0.000000
3/18/2011	4:12:58 PM	H2 MFC set to  500.000000
3/18/2011	4:12:58 PM	BCl3 MFC set to  3.000000
3/18/2011	4:12:58 PM	PHl3 MFC set to  0.000000
3/18/2011	4:12:58 PM	SiCl4 MFC set to  50.000000
3/18/2011	4:12:58 PM	Bypass solenoid MFC set to  0.000000
3/18/2011	4:12:58 PM	Tube furnace set to 1000
3/18/2011	4:27:58 PM	H2 valve closed
3/18/2011	4:27:58 PM	BCl3 valve closed
3/18/2011	4:27:58 PM	PH3 valve closed
3/18/2011	4:27:58 PM	SiCl4 pre valve closed
3/18/2011	4:27:58 PM	SiCl4 post valve closed
3/18/2011	4:27:58 PM	Main Vac valve closed
3/18/2011	4:27:58 PM	Bypass valve closed
3/18/2011	4:27:58 PM	Helium valve opened
3/18/2011	4:27:58 PM	Bubbler valve opened
3/18/2011	4:27:58 PM	Helium MFC set to  500.000000
3/18/2011	4:27:58 PM	H2 MFC set to  0.000000
3/18/2011	4:27:58 PM	BCl3 MFC set to  0.000000
3/18/2011	4:27:58 PM	PHl3 MFC set to  0.000000
3/18/2011	4:27:58 PM	SiCl4 MFC set to  0.000000
3/18/2011	4:27:58 PM	Bypass solenoid MFC set to  0.000000
3/18/2011	4:27:59 PM	Tube furnace set to 0
3/18/2011	4:47:59 PM	Helium valve closed
3/18/2011	4:47:59 PM	H2 valve closed
3/18/2011	4:47:59 PM	BCl3 valve closed
3/18/2011	4:47:59 PM	PH3 valve closed
3/18/2011	4:47:59 PM	SiCl4 pre valve closed
3/18/2011	4:47:59 PM	SiCl4 post valve closed
3/18/2011	4:47:59 PM	Main Vac valve closed
3/18/2011	4:47:59 PM	Bypass valve closed
3/18/2011	4:47:59 PM	Bubbler valve closed
3/18/2011	4:47:59 PM	Helium MFC set to  0.000000
3/18/2011	4:47:59 PM	H2 MFC set to  0.000000
3/18/2011	4:47:59 PM	BCl3 MFC set to  0.000000
3/18/2011	4:47:59 PM	PHl3 MFC set to  0.000000
3/18/2011	4:47:59 PM	SiCl4 MFC set to  0.000000
3/18/2011	4:47:59 PM	Bypass solenoid MFC set to  0.000000
3/18/2011	4:47:59 PM	Tube furnace set to 0
3/18/2011	4:47:59 PM	Run finished at 4:47 PM
3/18/2011	5:04:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/18/2011	5:04:03 PM	Recipe started at 5:04 PM
3/18/2011	5:04:03 PM	Helium valve closed
3/18/2011	5:04:03 PM	H2 valve closed
3/18/2011	5:04:03 PM	BCl3 valve closed
3/18/2011	5:04:03 PM	PH3 valve closed
3/18/2011	5:04:03 PM	SiCl4 pre valve closed
3/18/2011	5:04:03 PM	SiCl4 post valve closed
3/18/2011	5:04:03 PM	Main Vac valve closed
3/18/2011	5:04:03 PM	Bubbler valve closed
3/18/2011	5:04:03 PM	Bypass valve opened
3/18/2011	5:04:03 PM	Helium MFC set to  0.000000
3/18/2011	5:04:03 PM	H2 MFC set to  0.000000
3/18/2011	5:04:03 PM	BCl3 MFC set to  0.000000
3/18/2011	5:04:03 PM	PHl3 MFC set to  0.000000
3/18/2011	5:04:03 PM	SiCl4 MFC set to  0.000000
3/18/2011	5:04:03 PM	Bypass solenoid MFC set to  0.000000
3/18/2011	5:04:03 PM	Tube furnace set to 0
3/18/2011	5:04:36 PM	Helium valve closed
3/18/2011	5:04:36 PM	H2 valve closed
3/18/2011	5:04:36 PM	BCl3 valve closed
3/18/2011	5:04:36 PM	PH3 valve closed
3/18/2011	5:04:36 PM	SiCl4 pre valve closed
3/18/2011	5:04:36 PM	SiCl4 post valve closed
3/18/2011	5:04:36 PM	Bubbler valve closed
3/18/2011	5:04:36 PM	Main Vac valve opened
3/18/2011	5:04:36 PM	Bypass valve opened
3/18/2011	5:04:36 PM	Helium MFC set to  0.000000
3/18/2011	5:04:36 PM	H2 MFC set to  0.000000
3/18/2011	5:04:36 PM	BCl3 MFC set to  0.000000
3/18/2011	5:04:36 PM	PHl3 MFC set to  0.000000
3/18/2011	5:04:36 PM	SiCl4 MFC set to  0.000000
3/18/2011	5:04:36 PM	Bypass solenoid MFC set to  0.000000
3/18/2011	5:04:36 PM	Tube furnace set to 0
3/18/2011	5:04:37 PM	Run finished at 5:04 PM
3/18/2011	5:04:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/18/2011	5:59:59 PM	Recipe started at 5:59 PM
3/18/2011	5:59:59 PM	Helium valve closed
3/18/2011	5:59:59 PM	BCl3 valve closed
3/18/2011	5:59:59 PM	PH3 valve closed
3/18/2011	5:59:59 PM	SiCl4 pre valve closed
3/18/2011	5:59:59 PM	SiCl4 post valve closed
3/18/2011	5:59:59 PM	Main Vac valve closed
3/18/2011	5:59:59 PM	Bypass valve closed
3/18/2011	5:59:59 PM	Bubbler valve closed
3/18/2011	5:59:59 PM	H2 valve opened
3/18/2011	5:59:59 PM	Helium MFC set to  0.000000
3/18/2011	5:59:59 PM	H2 MFC set to  500.000000
3/18/2011	5:59:59 PM	BCl3 MFC set to  0.000000
3/18/2011	5:59:59 PM	PHl3 MFC set to  0.000000
3/18/2011	5:59:59 PM	SiCl4 MFC set to  0.000000
3/18/2011	5:59:59 PM	Bypass solenoid MFC set to  0.000000
3/18/2011	5:59:59 PM	Tube furnace set to 0
3/18/2011	6:01:18 PM	Helium valve closed
3/18/2011	6:01:18 PM	BCl3 valve closed
3/18/2011	6:01:18 PM	PH3 valve closed
3/18/2011	6:01:18 PM	SiCl4 pre valve closed
3/18/2011	6:01:18 PM	SiCl4 post valve closed
3/18/2011	6:01:18 PM	Main Vac valve closed
3/18/2011	6:01:18 PM	Bypass valve closed
3/18/2011	6:01:18 PM	H2 valve opened
3/18/2011	6:01:18 PM	Bubbler valve opened
3/18/2011	6:01:18 PM	Helium MFC set to  0.000000
3/18/2011	6:01:18 PM	H2 MFC set to  500.000000
3/18/2011	6:01:18 PM	BCl3 MFC set to  0.000000
3/18/2011	6:01:18 PM	PHl3 MFC set to  0.000000
3/18/2011	6:01:18 PM	SiCl4 MFC set to  0.000000
3/18/2011	6:01:18 PM	Bypass solenoid MFC set to  0.000000
3/18/2011	6:01:18 PM	Tube furnace set to 1000
3/18/2011	6:21:18 PM	Helium valve closed
3/18/2011	6:21:18 PM	PH3 valve closed
3/18/2011	6:21:18 PM	Main Vac valve closed
3/18/2011	6:21:18 PM	Bypass valve closed
3/18/2011	6:21:18 PM	H2 valve opened
3/18/2011	6:21:18 PM	BCl3 valve opened
3/18/2011	6:21:18 PM	SiCl4 pre valve opened
3/18/2011	6:21:18 PM	SiCl4 post valve opened
3/18/2011	6:21:18 PM	Bubbler valve opened
3/18/2011	6:21:18 PM	Helium MFC set to  0.000000
3/18/2011	6:21:18 PM	H2 MFC set to  500.000000
3/18/2011	6:21:18 PM	BCl3 MFC set to  3.000000
3/18/2011	6:21:18 PM	PHl3 MFC set to  0.000000
3/18/2011	6:21:18 PM	SiCl4 MFC set to  50.000000
3/18/2011	6:21:18 PM	Bypass solenoid MFC set to  0.000000
3/18/2011	6:21:18 PM	Tube furnace set to 1000
3/18/2011	6:36:18 PM	H2 valve closed
3/18/2011	6:36:18 PM	BCl3 valve closed
3/18/2011	6:36:18 PM	PH3 valve closed
3/18/2011	6:36:18 PM	SiCl4 pre valve closed
3/18/2011	6:36:18 PM	SiCl4 post valve closed
3/18/2011	6:36:18 PM	Main Vac valve closed
3/18/2011	6:36:18 PM	Bypass valve closed
3/18/2011	6:36:18 PM	Helium valve opened
3/18/2011	6:36:18 PM	Bubbler valve opened
3/18/2011	6:36:18 PM	Helium MFC set to  500.000000
3/18/2011	6:36:18 PM	H2 MFC set to  0.000000
3/18/2011	6:36:18 PM	BCl3 MFC set to  0.000000
3/18/2011	6:36:18 PM	PHl3 MFC set to  0.000000
3/18/2011	6:36:18 PM	SiCl4 MFC set to  0.000000
3/18/2011	6:36:18 PM	Bypass solenoid MFC set to  0.000000
3/18/2011	6:36:18 PM	Tube furnace set to 0
3/18/2011	6:51:08 PM	Helium valve closed
3/18/2011	6:51:08 PM	H2 valve closed
3/18/2011	6:51:08 PM	BCl3 valve closed
3/18/2011	6:51:08 PM	PH3 valve closed
3/18/2011	6:51:08 PM	SiCl4 pre valve closed
3/18/2011	6:51:08 PM	SiCl4 post valve closed
3/18/2011	6:51:08 PM	Main Vac valve closed
3/18/2011	6:51:08 PM	Bypass valve closed
3/18/2011	6:51:08 PM	Bubbler valve closed
3/18/2011	6:51:08 PM	Helium MFC set to  0.000000
3/18/2011	6:51:08 PM	H2 MFC set to  0.000000
3/18/2011	6:51:08 PM	BCl3 MFC set to  0.000000
3/18/2011	6:51:08 PM	PHl3 MFC set to  0.000000
3/18/2011	6:51:08 PM	SiCl4 MFC set to  0.000000
3/18/2011	6:51:08 PM	Bypass solenoid MFC set to  0.000000
3/18/2011	6:51:09 PM	Tube furnace set to 0
3/18/2011	6:51:09 PM	Run finished at 6:51 PM
3/18/2011	6:56:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/18/2011	6:56:26 PM	Recipe started at 6:56 PM
3/18/2011	6:56:26 PM	Helium valve closed
3/18/2011	6:56:26 PM	H2 valve closed
3/18/2011	6:56:26 PM	BCl3 valve closed
3/18/2011	6:56:26 PM	PH3 valve closed
3/18/2011	6:56:26 PM	SiCl4 pre valve closed
3/18/2011	6:56:26 PM	SiCl4 post valve closed
3/18/2011	6:56:26 PM	Main Vac valve closed
3/18/2011	6:56:26 PM	Bubbler valve closed
3/18/2011	6:56:26 PM	Bypass valve opened
3/18/2011	6:56:26 PM	Helium MFC set to  0.000000
3/18/2011	6:56:26 PM	H2 MFC set to  0.000000
3/18/2011	6:56:26 PM	BCl3 MFC set to  0.000000
3/18/2011	6:56:26 PM	PHl3 MFC set to  0.000000
3/18/2011	6:56:26 PM	SiCl4 MFC set to  0.000000
3/18/2011	6:56:26 PM	Bypass solenoid MFC set to  0.000000
3/18/2011	6:56:27 PM	Tube furnace set to 0
3/18/2011	6:56:59 PM	Helium valve closed
3/18/2011	6:56:59 PM	H2 valve closed
3/18/2011	6:56:59 PM	BCl3 valve closed
3/18/2011	6:56:59 PM	PH3 valve closed
3/18/2011	6:56:59 PM	SiCl4 pre valve closed
3/18/2011	6:56:59 PM	SiCl4 post valve closed
3/18/2011	6:56:59 PM	Bubbler valve closed
3/18/2011	6:56:59 PM	Main Vac valve opened
3/18/2011	6:56:59 PM	Bypass valve opened
3/18/2011	6:56:59 PM	Helium MFC set to  0.000000
3/18/2011	6:56:59 PM	H2 MFC set to  0.000000
3/18/2011	6:56:59 PM	BCl3 MFC set to  0.000000
3/18/2011	6:56:59 PM	PHl3 MFC set to  0.000000
3/18/2011	6:56:59 PM	SiCl4 MFC set to  0.000000
3/18/2011	6:56:59 PM	Bypass solenoid MFC set to  0.000000
3/18/2011	6:56:59 PM	Tube furnace set to 0
3/18/2011	6:56:59 PM	Run finished at 6:56 PM
3/18/2011	6:56:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/18/2011	9:06:52 PM	Helium MFC set to  10.000000
3/18/2011	9:06:53 PM	Helium valve opened
3/18/2011	9:07:59 PM	Helium MFC set to  0.000000
3/18/2011	9:07:59 PM	Helium valve closed
3/18/2011	9:08:46 PM	Recipe started at 9:08 PM
3/18/2011	9:08:46 PM	Helium valve closed
3/18/2011	9:08:46 PM	BCl3 valve closed
3/18/2011	9:08:46 PM	PH3 valve closed
3/18/2011	9:08:46 PM	SiCl4 pre valve closed
3/18/2011	9:08:46 PM	SiCl4 post valve closed
3/18/2011	9:08:46 PM	Main Vac valve closed
3/18/2011	9:08:46 PM	Bypass valve closed
3/18/2011	9:08:46 PM	Bubbler valve closed
3/18/2011	9:08:46 PM	H2 valve opened
3/18/2011	9:08:46 PM	Helium MFC set to  0.000000
3/18/2011	9:08:46 PM	H2 MFC set to  500.000000
3/18/2011	9:08:46 PM	BCl3 MFC set to  0.000000
3/18/2011	9:08:46 PM	PHl3 MFC set to  0.000000
3/18/2011	9:08:46 PM	SiCl4 MFC set to  0.000000
3/18/2011	9:08:46 PM	Bypass solenoid MFC set to  0.000000
3/18/2011	9:08:46 PM	Tube furnace set to 0
3/18/2011	9:10:09 PM	Helium valve closed
3/18/2011	9:10:09 PM	BCl3 valve closed
3/18/2011	9:10:09 PM	PH3 valve closed
3/18/2011	9:10:09 PM	SiCl4 pre valve closed
3/18/2011	9:10:09 PM	SiCl4 post valve closed
3/18/2011	9:10:09 PM	Main Vac valve closed
3/18/2011	9:10:09 PM	Bypass valve closed
3/18/2011	9:10:09 PM	H2 valve opened
3/18/2011	9:10:09 PM	Bubbler valve opened
3/18/2011	9:10:09 PM	Helium MFC set to  0.000000
3/18/2011	9:10:09 PM	H2 MFC set to  500.000000
3/18/2011	9:10:09 PM	BCl3 MFC set to  0.000000
3/18/2011	9:10:09 PM	PHl3 MFC set to  0.000000
3/18/2011	9:10:09 PM	SiCl4 MFC set to  0.000000
3/18/2011	9:10:09 PM	Bypass solenoid MFC set to  0.000000
3/18/2011	9:10:09 PM	Tube furnace set to 1000
3/18/2011	9:30:09 PM	Helium valve closed
3/18/2011	9:30:09 PM	PH3 valve closed
3/18/2011	9:30:09 PM	Main Vac valve closed
3/18/2011	9:30:09 PM	Bypass valve closed
3/18/2011	9:30:09 PM	H2 valve opened
3/18/2011	9:30:09 PM	BCl3 valve opened
3/18/2011	9:30:09 PM	SiCl4 pre valve opened
3/18/2011	9:30:09 PM	SiCl4 post valve opened
3/18/2011	9:30:09 PM	Bubbler valve opened
3/18/2011	9:30:09 PM	Helium MFC set to  0.000000
3/18/2011	9:30:09 PM	H2 MFC set to  500.000000
3/18/2011	9:30:09 PM	BCl3 MFC set to  3.000000
3/18/2011	9:30:09 PM	PHl3 MFC set to  0.000000
3/18/2011	9:30:09 PM	SiCl4 MFC set to  75.000000
3/18/2011	9:30:09 PM	Bypass solenoid MFC set to  0.000000
3/18/2011	9:30:09 PM	Tube furnace set to 1000
3/18/2011	9:45:09 PM	H2 valve closed
3/18/2011	9:45:09 PM	BCl3 valve closed
3/18/2011	9:45:09 PM	PH3 valve closed
3/18/2011	9:45:09 PM	SiCl4 pre valve closed
3/18/2011	9:45:09 PM	SiCl4 post valve closed
3/18/2011	9:45:09 PM	Main Vac valve closed
3/18/2011	9:45:09 PM	Bypass valve closed
3/18/2011	9:45:09 PM	Helium valve opened
3/18/2011	9:45:09 PM	Bubbler valve opened
3/18/2011	9:45:09 PM	Helium MFC set to  500.000000
3/18/2011	9:45:09 PM	H2 MFC set to  0.000000
3/18/2011	9:45:09 PM	BCl3 MFC set to  0.000000
3/18/2011	9:45:09 PM	PHl3 MFC set to  0.000000
3/18/2011	9:45:09 PM	SiCl4 MFC set to  0.000000
3/18/2011	9:45:09 PM	Bypass solenoid MFC set to  0.000000
3/18/2011	9:45:09 PM	Tube furnace set to 0
3/18/2011	10:05:09 PM	Helium valve closed
3/18/2011	10:05:09 PM	H2 valve closed
3/18/2011	10:05:09 PM	BCl3 valve closed
3/18/2011	10:05:09 PM	PH3 valve closed
3/18/2011	10:05:09 PM	SiCl4 pre valve closed
3/18/2011	10:05:09 PM	SiCl4 post valve closed
3/18/2011	10:05:09 PM	Main Vac valve closed
3/18/2011	10:05:09 PM	Bypass valve closed
3/18/2011	10:05:09 PM	Bubbler valve closed
3/18/2011	10:05:09 PM	Helium MFC set to  0.000000
3/18/2011	10:05:09 PM	H2 MFC set to  0.000000
3/18/2011	10:05:09 PM	BCl3 MFC set to  0.000000
3/18/2011	10:05:09 PM	PHl3 MFC set to  0.000000
3/18/2011	10:05:09 PM	SiCl4 MFC set to  0.000000
3/18/2011	10:05:09 PM	Bypass solenoid MFC set to  0.000000
3/18/2011	10:05:10 PM	Tube furnace set to 0
3/18/2011	10:05:10 PM	Run finished at 10:05 PM
3/18/2011	10:33:04 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/18/2011	10:33:05 PM	Recipe started at 10:33 PM
3/18/2011	10:33:05 PM	H2 valve closed
3/18/2011	10:33:05 PM	BCl3 valve closed
3/18/2011	10:33:05 PM	PH3 valve closed
3/18/2011	10:33:05 PM	SiCl4 pre valve closed
3/18/2011	10:33:05 PM	SiCl4 post valve closed
3/18/2011	10:33:05 PM	Main Vac valve closed
3/18/2011	10:33:05 PM	Bypass valve closed
3/18/2011	10:33:05 PM	Bubbler valve closed
3/18/2011	10:33:05 PM	Helium valve opened
3/18/2011	10:33:05 PM	Helium MFC set to  500.000000
3/18/2011	10:33:05 PM	H2 MFC set to  0.000000
3/18/2011	10:33:05 PM	BCl3 MFC set to  0.000000
3/18/2011	10:33:05 PM	PHl3 MFC set to  0.000000
3/18/2011	10:33:05 PM	SiCl4 MFC set to  0.000000
3/18/2011	10:33:05 PM	Bypass solenoid MFC set to  0.000000
3/18/2011	10:33:05 PM	Tube furnace set to 0
3/18/2011	10:33:10 PM	Helium valve closed
3/18/2011	10:33:10 PM	H2 valve closed
3/18/2011	10:33:10 PM	BCl3 valve closed
3/18/2011	10:33:10 PM	PH3 valve closed
3/18/2011	10:33:10 PM	SiCl4 pre valve closed
3/18/2011	10:33:10 PM	SiCl4 post valve closed
3/18/2011	10:33:10 PM	Main Vac valve closed
3/18/2011	10:33:10 PM	Bypass valve closed
3/18/2011	10:33:10 PM	Bubbler valve closed
3/18/2011	10:33:10 PM	Helium MFC set to  0.000000
3/18/2011	10:33:10 PM	H2 MFC set to  0.000000
3/18/2011	10:33:10 PM	BCl3 MFC set to  0.000000
3/18/2011	10:33:10 PM	PHl3 MFC set to  0.000000
3/18/2011	10:33:10 PM	SiCl4 MFC set to  0.000000
3/18/2011	10:33:10 PM	Bypass solenoid MFC set to  0.000000
3/18/2011	10:33:10 PM	Tube furnace set to 0
3/18/2011	10:33:11 PM	Run finished at 10:33 PM
3/18/2011	10:33:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/18/2011	10:40:10 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/18/2011	10:40:11 PM	Recipe started at 10:40 PM
3/18/2011	10:40:11 PM	Helium valve closed
3/18/2011	10:40:11 PM	H2 valve closed
3/18/2011	10:40:11 PM	BCl3 valve closed
3/18/2011	10:40:11 PM	PH3 valve closed
3/18/2011	10:40:11 PM	SiCl4 pre valve closed
3/18/2011	10:40:11 PM	SiCl4 post valve closed
3/18/2011	10:40:11 PM	Main Vac valve closed
3/18/2011	10:40:11 PM	Bubbler valve closed
3/18/2011	10:40:11 PM	Bypass valve opened
3/18/2011	10:40:11 PM	Helium MFC set to  0.000000
3/18/2011	10:40:11 PM	H2 MFC set to  0.000000
3/18/2011	10:40:11 PM	BCl3 MFC set to  0.000000
3/18/2011	10:40:11 PM	PHl3 MFC set to  0.000000
3/18/2011	10:40:11 PM	SiCl4 MFC set to  0.000000
3/18/2011	10:40:11 PM	Bypass solenoid MFC set to  0.000000
3/18/2011	10:40:11 PM	Tube furnace set to 0
3/18/2011	10:40:43 PM	Helium valve closed
3/18/2011	10:40:43 PM	H2 valve closed
3/18/2011	10:40:43 PM	BCl3 valve closed
3/18/2011	10:40:43 PM	PH3 valve closed
3/18/2011	10:40:43 PM	SiCl4 pre valve closed
3/18/2011	10:40:43 PM	SiCl4 post valve closed
3/18/2011	10:40:43 PM	Bubbler valve closed
3/18/2011	10:40:43 PM	Main Vac valve opened
3/18/2011	10:40:43 PM	Bypass valve opened
3/18/2011	10:40:43 PM	Helium MFC set to  0.000000
3/18/2011	10:40:43 PM	H2 MFC set to  0.000000
3/18/2011	10:40:43 PM	BCl3 MFC set to  0.000000
3/18/2011	10:40:43 PM	PHl3 MFC set to  0.000000
3/18/2011	10:40:43 PM	SiCl4 MFC set to  0.000000
3/18/2011	10:40:43 PM	Bypass solenoid MFC set to  0.000000
3/18/2011	10:40:43 PM	Tube furnace set to 0
3/18/2011	10:40:44 PM	Run finished at 10:40 PM
3/18/2011	10:40:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/18/2011	10:41:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/18/2011	10:41:46 PM	Recipe started at 10:41 PM
3/18/2011	10:41:46 PM	Helium valve closed
3/18/2011	10:41:46 PM	H2 valve closed
3/18/2011	10:41:46 PM	BCl3 valve closed
3/18/2011	10:41:46 PM	PH3 valve closed
3/18/2011	10:41:46 PM	SiCl4 pre valve closed
3/18/2011	10:41:46 PM	SiCl4 post valve closed
3/18/2011	10:41:46 PM	Main Vac valve closed
3/18/2011	10:41:46 PM	Bubbler valve closed
3/18/2011	10:41:46 PM	Bypass valve opened
3/18/2011	10:41:46 PM	Helium MFC set to  0.000000
3/18/2011	10:41:46 PM	H2 MFC set to  0.000000
3/18/2011	10:41:46 PM	BCl3 MFC set to  0.000000
3/18/2011	10:41:46 PM	PHl3 MFC set to  0.000000
3/18/2011	10:41:46 PM	SiCl4 MFC set to  0.000000
3/18/2011	10:41:46 PM	Bypass solenoid MFC set to  0.000000
3/18/2011	10:41:46 PM	Tube furnace set to 0
3/18/2011	10:41:46 PM	Helium valve closed
3/18/2011	10:41:46 PM	H2 valve closed
3/18/2011	10:41:46 PM	BCl3 valve closed
3/18/2011	10:41:46 PM	PH3 valve closed
3/18/2011	10:41:46 PM	SiCl4 pre valve closed
3/18/2011	10:41:46 PM	SiCl4 post valve closed
3/18/2011	10:41:46 PM	Bubbler valve closed
3/18/2011	10:41:46 PM	Main Vac valve opened
3/18/2011	10:41:46 PM	Bypass valve opened
3/18/2011	10:41:46 PM	Helium MFC set to  0.000000
3/18/2011	10:41:46 PM	H2 MFC set to  0.000000
3/18/2011	10:41:46 PM	BCl3 MFC set to  0.000000
3/18/2011	10:41:46 PM	PHl3 MFC set to  0.000000
3/18/2011	10:41:46 PM	SiCl4 MFC set to  0.000000
3/18/2011	10:41:46 PM	Bypass solenoid MFC set to  0.000000
3/18/2011	10:41:47 PM	Tube furnace set to 0
3/18/2011	10:42:47 PM	H2 valve closed
3/18/2011	10:42:47 PM	BCl3 valve closed
3/18/2011	10:42:47 PM	PH3 valve closed
3/18/2011	10:42:47 PM	SiCl4 pre valve closed
3/18/2011	10:42:47 PM	SiCl4 post valve closed
3/18/2011	10:42:47 PM	Bubbler valve closed
3/18/2011	10:42:47 PM	Helium valve opened
3/18/2011	10:42:47 PM	Main Vac valve opened
3/18/2011	10:42:47 PM	Bypass valve opened
3/18/2011	10:42:47 PM	Helium MFC set to  100.000000
3/18/2011	10:42:47 PM	H2 MFC set to  0.000000
3/18/2011	10:42:47 PM	BCl3 MFC set to  0.000000
3/18/2011	10:42:47 PM	PHl3 MFC set to  0.000000
3/18/2011	10:42:47 PM	SiCl4 MFC set to  0.000000
3/18/2011	10:42:47 PM	Bypass solenoid MFC set to  0.000000
3/18/2011	10:42:47 PM	Tube furnace set to 0
3/18/2011	10:43:47 PM	Helium valve closed
3/18/2011	10:43:47 PM	H2 valve closed
3/18/2011	10:43:47 PM	BCl3 valve closed
3/18/2011	10:43:47 PM	PH3 valve closed
3/18/2011	10:43:47 PM	SiCl4 pre valve closed
3/18/2011	10:43:47 PM	SiCl4 post valve closed
3/18/2011	10:43:47 PM	Bubbler valve closed
3/18/2011	10:43:47 PM	Main Vac valve opened
3/18/2011	10:43:47 PM	Bypass valve opened
3/18/2011	10:43:47 PM	Helium MFC set to  0.000000
3/18/2011	10:43:47 PM	H2 MFC set to  0.000000
3/18/2011	10:43:47 PM	BCl3 MFC set to  0.000000
3/18/2011	10:43:47 PM	PHl3 MFC set to  0.000000
3/18/2011	10:43:47 PM	SiCl4 MFC set to  0.000000
3/18/2011	10:43:47 PM	Bypass solenoid MFC set to  0.000000
3/18/2011	10:43:47 PM	Tube furnace set to 0
3/18/2011	10:44:47 PM	H2 valve closed
3/18/2011	10:44:47 PM	BCl3 valve closed
3/18/2011	10:44:47 PM	PH3 valve closed
3/18/2011	10:44:47 PM	SiCl4 pre valve closed
3/18/2011	10:44:47 PM	SiCl4 post valve closed
3/18/2011	10:44:47 PM	Bubbler valve closed
3/18/2011	10:44:47 PM	Helium valve opened
3/18/2011	10:44:47 PM	Main Vac valve opened
3/18/2011	10:44:47 PM	Bypass valve opened
3/18/2011	10:44:47 PM	Helium MFC set to  100.000000
3/18/2011	10:44:47 PM	H2 MFC set to  0.000000
3/18/2011	10:44:47 PM	BCl3 MFC set to  0.000000
3/18/2011	10:44:47 PM	PHl3 MFC set to  0.000000
3/18/2011	10:44:47 PM	SiCl4 MFC set to  0.000000
3/18/2011	10:44:47 PM	Bypass solenoid MFC set to  0.000000
3/18/2011	10:44:47 PM	Tube furnace set to 0
3/18/2011	10:45:47 PM	Helium valve closed
3/18/2011	10:45:47 PM	H2 valve closed
3/18/2011	10:45:47 PM	BCl3 valve closed
3/18/2011	10:45:47 PM	PH3 valve closed
3/18/2011	10:45:47 PM	SiCl4 pre valve closed
3/18/2011	10:45:47 PM	SiCl4 post valve closed
3/18/2011	10:45:47 PM	Bubbler valve closed
3/18/2011	10:45:47 PM	Main Vac valve opened
3/18/2011	10:45:47 PM	Bypass valve opened
3/18/2011	10:45:47 PM	Helium MFC set to  0.000000
3/18/2011	10:45:47 PM	H2 MFC set to  0.000000
3/18/2011	10:45:47 PM	BCl3 MFC set to  0.000000
3/18/2011	10:45:47 PM	PHl3 MFC set to  0.000000
3/18/2011	10:45:47 PM	SiCl4 MFC set to  0.000000
3/18/2011	10:45:47 PM	Bypass solenoid MFC set to  0.000000
3/18/2011	10:45:47 PM	Tube furnace set to 0
3/18/2011	10:46:47 PM	H2 valve closed
3/18/2011	10:46:47 PM	BCl3 valve closed
3/18/2011	10:46:47 PM	PH3 valve closed
3/18/2011	10:46:47 PM	SiCl4 pre valve closed
3/18/2011	10:46:47 PM	SiCl4 post valve closed
3/18/2011	10:46:47 PM	Bubbler valve closed
3/18/2011	10:46:48 PM	Helium valve opened
3/18/2011	10:46:48 PM	Main Vac valve opened
3/18/2011	10:46:48 PM	Bypass valve opened
3/18/2011	10:46:48 PM	Helium MFC set to  100.000000
3/18/2011	10:46:48 PM	H2 MFC set to  0.000000
3/18/2011	10:46:48 PM	BCl3 MFC set to  0.000000
3/18/2011	10:46:48 PM	PHl3 MFC set to  0.000000
3/18/2011	10:46:48 PM	SiCl4 MFC set to  0.000000
3/18/2011	10:46:48 PM	Bypass solenoid MFC set to  0.000000
3/18/2011	10:46:48 PM	Tube furnace set to 0
3/18/2011	10:47:48 PM	Helium valve closed
3/18/2011	10:47:48 PM	H2 valve closed
3/18/2011	10:47:48 PM	BCl3 valve closed
3/18/2011	10:47:48 PM	PH3 valve closed
3/18/2011	10:47:48 PM	SiCl4 pre valve closed
3/18/2011	10:47:48 PM	SiCl4 post valve closed
3/18/2011	10:47:48 PM	Bubbler valve closed
3/18/2011	10:47:48 PM	Main Vac valve opened
3/18/2011	10:47:48 PM	Bypass valve opened
3/18/2011	10:47:48 PM	Helium MFC set to  0.000000
3/18/2011	10:47:48 PM	H2 MFC set to  0.000000
3/18/2011	10:47:48 PM	BCl3 MFC set to  0.000000
3/18/2011	10:47:48 PM	PHl3 MFC set to  0.000000
3/18/2011	10:47:48 PM	SiCl4 MFC set to  0.000000
3/18/2011	10:47:48 PM	Bypass solenoid MFC set to  0.000000
3/18/2011	10:47:48 PM	Tube furnace set to 0
3/18/2011	10:48:48 PM	H2 valve closed
3/18/2011	10:48:48 PM	BCl3 valve closed
3/18/2011	10:48:48 PM	PH3 valve closed
3/18/2011	10:48:48 PM	SiCl4 pre valve closed
3/18/2011	10:48:48 PM	SiCl4 post valve closed
3/18/2011	10:48:48 PM	Bubbler valve closed
3/18/2011	10:48:48 PM	Helium valve opened
3/18/2011	10:48:48 PM	Main Vac valve opened
3/18/2011	10:48:48 PM	Bypass valve opened
3/18/2011	10:48:48 PM	Helium MFC set to  100.000000
3/18/2011	10:48:48 PM	H2 MFC set to  0.000000
3/18/2011	10:48:48 PM	BCl3 MFC set to  0.000000
3/18/2011	10:48:48 PM	PHl3 MFC set to  0.000000
3/18/2011	10:48:48 PM	SiCl4 MFC set to  0.000000
3/18/2011	10:48:48 PM	Bypass solenoid MFC set to  0.000000
3/18/2011	10:48:48 PM	Tube furnace set to 0
3/18/2011	10:49:48 PM	Helium valve closed
3/18/2011	10:49:48 PM	H2 valve closed
3/18/2011	10:49:48 PM	BCl3 valve closed
3/18/2011	10:49:48 PM	PH3 valve closed
3/18/2011	10:49:48 PM	SiCl4 pre valve closed
3/18/2011	10:49:48 PM	SiCl4 post valve closed
3/18/2011	10:49:48 PM	Bubbler valve closed
3/18/2011	10:49:48 PM	Main Vac valve opened
3/18/2011	10:49:48 PM	Bypass valve opened
3/18/2011	10:49:48 PM	Helium MFC set to  0.000000
3/18/2011	10:49:48 PM	H2 MFC set to  0.000000
3/18/2011	10:49:48 PM	BCl3 MFC set to  0.000000
3/18/2011	10:49:48 PM	PHl3 MFC set to  0.000000
3/18/2011	10:49:48 PM	SiCl4 MFC set to  0.000000
3/18/2011	10:49:48 PM	Bypass solenoid MFC set to  0.000000
3/18/2011	10:49:48 PM	Tube furnace set to 0
3/18/2011	10:50:48 PM	H2 valve closed
3/18/2011	10:50:48 PM	BCl3 valve closed
3/18/2011	10:50:48 PM	PH3 valve closed
3/18/2011	10:50:48 PM	SiCl4 pre valve closed
3/18/2011	10:50:48 PM	SiCl4 post valve closed
3/18/2011	10:50:48 PM	Bubbler valve closed
3/18/2011	10:50:48 PM	Helium valve opened
3/18/2011	10:50:48 PM	Main Vac valve opened
3/18/2011	10:50:48 PM	Bypass valve opened
3/18/2011	10:50:48 PM	Helium MFC set to  100.000000
3/18/2011	10:50:48 PM	H2 MFC set to  0.000000
3/18/2011	10:50:48 PM	BCl3 MFC set to  0.000000
3/18/2011	10:50:48 PM	PHl3 MFC set to  0.000000
3/18/2011	10:50:48 PM	SiCl4 MFC set to  0.000000
3/18/2011	10:50:48 PM	Bypass solenoid MFC set to  0.000000
3/18/2011	10:50:48 PM	Tube furnace set to 0
3/18/2011	10:51:49 PM	Helium valve closed
3/18/2011	10:51:49 PM	H2 valve closed
3/18/2011	10:51:49 PM	BCl3 valve closed
3/18/2011	10:51:49 PM	PH3 valve closed
3/18/2011	10:51:49 PM	SiCl4 pre valve closed
3/18/2011	10:51:49 PM	SiCl4 post valve closed
3/18/2011	10:51:49 PM	Bubbler valve closed
3/18/2011	10:51:49 PM	Main Vac valve opened
3/18/2011	10:51:49 PM	Bypass valve opened
3/18/2011	10:51:49 PM	Helium MFC set to  0.000000
3/18/2011	10:51:49 PM	H2 MFC set to  0.000000
3/18/2011	10:51:49 PM	BCl3 MFC set to  0.000000
3/18/2011	10:51:49 PM	PHl3 MFC set to  0.000000
3/18/2011	10:51:49 PM	SiCl4 MFC set to  0.000000
3/18/2011	10:51:49 PM	Bypass solenoid MFC set to  0.000000
3/18/2011	10:51:49 PM	Tube furnace set to 0
3/18/2011	10:52:49 PM	H2 valve closed
3/18/2011	10:52:49 PM	BCl3 valve closed
3/18/2011	10:52:49 PM	PH3 valve closed
3/18/2011	10:52:49 PM	SiCl4 pre valve closed
3/18/2011	10:52:49 PM	SiCl4 post valve closed
3/18/2011	10:52:49 PM	Bubbler valve closed
3/18/2011	10:52:49 PM	Helium valve opened
3/18/2011	10:52:49 PM	Main Vac valve opened
3/18/2011	10:52:49 PM	Bypass valve opened
3/18/2011	10:52:49 PM	Helium MFC set to  100.000000
3/18/2011	10:52:49 PM	H2 MFC set to  0.000000
3/18/2011	10:52:49 PM	BCl3 MFC set to  0.000000
3/18/2011	10:52:49 PM	PHl3 MFC set to  0.000000
3/18/2011	10:52:49 PM	SiCl4 MFC set to  0.000000
3/18/2011	10:52:49 PM	Bypass solenoid MFC set to  0.000000
3/18/2011	10:52:49 PM	Tube furnace set to 0
3/18/2011	10:53:49 PM	Helium valve closed
3/18/2011	10:53:49 PM	H2 valve closed
3/18/2011	10:53:49 PM	BCl3 valve closed
3/18/2011	10:53:49 PM	PH3 valve closed
3/18/2011	10:53:49 PM	SiCl4 pre valve closed
3/18/2011	10:53:49 PM	SiCl4 post valve closed
3/18/2011	10:53:49 PM	Bubbler valve closed
3/18/2011	10:53:49 PM	Main Vac valve opened
3/18/2011	10:53:49 PM	Bypass valve opened
3/18/2011	10:53:49 PM	Helium MFC set to  0.000000
3/18/2011	10:53:49 PM	H2 MFC set to  0.000000
3/18/2011	10:53:49 PM	BCl3 MFC set to  0.000000
3/18/2011	10:53:49 PM	PHl3 MFC set to  0.000000
3/18/2011	10:53:49 PM	SiCl4 MFC set to  0.000000
3/18/2011	10:53:49 PM	Bypass solenoid MFC set to  0.000000
3/18/2011	10:53:49 PM	Tube furnace set to 0
3/18/2011	10:54:49 PM	H2 valve closed
3/18/2011	10:54:49 PM	BCl3 valve closed
3/18/2011	10:54:49 PM	PH3 valve closed
3/18/2011	10:54:49 PM	SiCl4 pre valve closed
3/18/2011	10:54:49 PM	SiCl4 post valve closed
3/18/2011	10:54:49 PM	Bubbler valve closed
3/18/2011	10:54:49 PM	Helium valve opened
3/18/2011	10:54:49 PM	Main Vac valve opened
3/18/2011	10:54:49 PM	Bypass valve opened
3/18/2011	10:54:49 PM	Helium MFC set to  100.000000
3/18/2011	10:54:49 PM	H2 MFC set to  0.000000
3/18/2011	10:54:49 PM	BCl3 MFC set to  0.000000
3/18/2011	10:54:49 PM	PHl3 MFC set to  0.000000
3/18/2011	10:54:49 PM	SiCl4 MFC set to  0.000000
3/18/2011	10:54:49 PM	Bypass solenoid MFC set to  0.000000
3/18/2011	10:54:49 PM	Tube furnace set to 0
3/18/2011	10:55:50 PM	Helium valve closed
3/18/2011	10:55:50 PM	H2 valve closed
3/18/2011	10:55:50 PM	BCl3 valve closed
3/18/2011	10:55:50 PM	PH3 valve closed
3/18/2011	10:55:50 PM	SiCl4 pre valve closed
3/18/2011	10:55:50 PM	SiCl4 post valve closed
3/18/2011	10:55:50 PM	Bubbler valve closed
3/18/2011	10:55:50 PM	Main Vac valve opened
3/18/2011	10:55:50 PM	Bypass valve opened
3/18/2011	10:55:50 PM	Helium MFC set to  0.000000
3/18/2011	10:55:50 PM	H2 MFC set to  0.000000
3/18/2011	10:55:50 PM	BCl3 MFC set to  0.000000
3/18/2011	10:55:50 PM	PHl3 MFC set to  0.000000
3/18/2011	10:55:50 PM	SiCl4 MFC set to  0.000000
3/18/2011	10:55:50 PM	Bypass solenoid MFC set to  0.000000
3/18/2011	10:55:50 PM	Tube furnace set to 0
3/18/2011	10:56:50 PM	H2 valve closed
3/18/2011	10:56:50 PM	BCl3 valve closed
3/18/2011	10:56:50 PM	PH3 valve closed
3/18/2011	10:56:50 PM	SiCl4 pre valve closed
3/18/2011	10:56:50 PM	SiCl4 post valve closed
3/18/2011	10:56:50 PM	Bubbler valve closed
3/18/2011	10:56:50 PM	Helium valve opened
3/18/2011	10:56:50 PM	Main Vac valve opened
3/18/2011	10:56:50 PM	Bypass valve opened
3/18/2011	10:56:50 PM	Helium MFC set to  100.000000
3/18/2011	10:56:50 PM	H2 MFC set to  0.000000
3/18/2011	10:56:50 PM	BCl3 MFC set to  0.000000
3/18/2011	10:56:50 PM	PHl3 MFC set to  0.000000
3/18/2011	10:56:50 PM	SiCl4 MFC set to  0.000000
3/18/2011	10:56:50 PM	Bypass solenoid MFC set to  0.000000
3/18/2011	10:56:50 PM	Tube furnace set to 0
3/18/2011	10:57:50 PM	Helium valve closed
3/18/2011	10:57:50 PM	H2 valve closed
3/18/2011	10:57:50 PM	BCl3 valve closed
3/18/2011	10:57:50 PM	PH3 valve closed
3/18/2011	10:57:50 PM	SiCl4 pre valve closed
3/18/2011	10:57:50 PM	SiCl4 post valve closed
3/18/2011	10:57:50 PM	Bubbler valve closed
3/18/2011	10:57:50 PM	Main Vac valve opened
3/18/2011	10:57:50 PM	Bypass valve opened
3/18/2011	10:57:50 PM	Helium MFC set to  0.000000
3/18/2011	10:57:50 PM	H2 MFC set to  0.000000
3/18/2011	10:57:50 PM	BCl3 MFC set to  0.000000
3/18/2011	10:57:50 PM	PHl3 MFC set to  0.000000
3/18/2011	10:57:50 PM	SiCl4 MFC set to  0.000000
3/18/2011	10:57:50 PM	Bypass solenoid MFC set to  0.000000
3/18/2011	10:57:50 PM	Tube furnace set to 0
3/18/2011	10:58:50 PM	H2 valve closed
3/18/2011	10:58:50 PM	BCl3 valve closed
3/18/2011	10:58:50 PM	PH3 valve closed
3/18/2011	10:58:50 PM	SiCl4 pre valve closed
3/18/2011	10:58:50 PM	SiCl4 post valve closed
3/18/2011	10:58:50 PM	Bubbler valve closed
3/18/2011	10:58:50 PM	Helium valve opened
3/18/2011	10:58:50 PM	Main Vac valve opened
3/18/2011	10:58:50 PM	Bypass valve opened
3/18/2011	10:58:50 PM	Helium MFC set to  100.000000
3/18/2011	10:58:50 PM	H2 MFC set to  0.000000
3/18/2011	10:58:50 PM	BCl3 MFC set to  0.000000
3/18/2011	10:58:50 PM	PHl3 MFC set to  0.000000
3/18/2011	10:58:50 PM	SiCl4 MFC set to  0.000000
3/18/2011	10:58:50 PM	Bypass solenoid MFC set to  0.000000
3/18/2011	10:58:51 PM	Tube furnace set to 0
3/18/2011	10:59:51 PM	Helium valve closed
3/18/2011	10:59:51 PM	H2 valve closed
3/18/2011	10:59:51 PM	BCl3 valve closed
3/18/2011	10:59:51 PM	PH3 valve closed
3/18/2011	10:59:51 PM	SiCl4 pre valve closed
3/18/2011	10:59:51 PM	SiCl4 post valve closed
3/18/2011	10:59:51 PM	Bubbler valve closed
3/18/2011	10:59:51 PM	Main Vac valve opened
3/18/2011	10:59:51 PM	Bypass valve opened
3/18/2011	10:59:51 PM	Helium MFC set to  0.000000
3/18/2011	10:59:51 PM	H2 MFC set to  0.000000
3/18/2011	10:59:51 PM	BCl3 MFC set to  0.000000
3/18/2011	10:59:51 PM	PHl3 MFC set to  0.000000
3/18/2011	10:59:51 PM	SiCl4 MFC set to  0.000000
3/18/2011	10:59:51 PM	Bypass solenoid MFC set to  0.000000
3/18/2011	10:59:51 PM	Tube furnace set to 0
3/18/2011	11:00:51 PM	H2 valve closed
3/18/2011	11:00:51 PM	BCl3 valve closed
3/18/2011	11:00:51 PM	PH3 valve closed
3/18/2011	11:00:51 PM	SiCl4 pre valve closed
3/18/2011	11:00:51 PM	SiCl4 post valve closed
3/18/2011	11:00:51 PM	Bubbler valve closed
3/18/2011	11:00:51 PM	Helium valve opened
3/18/2011	11:00:51 PM	Main Vac valve opened
3/18/2011	11:00:51 PM	Bypass valve opened
3/18/2011	11:00:51 PM	Helium MFC set to  100.000000
3/18/2011	11:00:51 PM	H2 MFC set to  0.000000
3/18/2011	11:00:51 PM	BCl3 MFC set to  0.000000
3/18/2011	11:00:51 PM	PHl3 MFC set to  0.000000
3/18/2011	11:00:51 PM	SiCl4 MFC set to  0.000000
3/18/2011	11:00:51 PM	Bypass solenoid MFC set to  0.000000
3/18/2011	11:00:51 PM	Tube furnace set to 0
3/18/2011	11:01:51 PM	Helium valve closed
3/18/2011	11:01:51 PM	H2 valve closed
3/18/2011	11:01:51 PM	BCl3 valve closed
3/18/2011	11:01:51 PM	PH3 valve closed
3/18/2011	11:01:51 PM	SiCl4 pre valve closed
3/18/2011	11:01:51 PM	SiCl4 post valve closed
3/18/2011	11:01:51 PM	Bubbler valve closed
3/18/2011	11:01:51 PM	Main Vac valve opened
3/18/2011	11:01:51 PM	Bypass valve opened
3/18/2011	11:01:51 PM	Helium MFC set to  0.000000
3/18/2011	11:01:51 PM	H2 MFC set to  0.000000
3/18/2011	11:01:51 PM	BCl3 MFC set to  0.000000
3/18/2011	11:01:51 PM	PHl3 MFC set to  0.000000
3/18/2011	11:01:51 PM	SiCl4 MFC set to  0.000000
3/18/2011	11:01:51 PM	Bypass solenoid MFC set to  0.000000
3/18/2011	11:01:51 PM	Tube furnace set to 0
3/18/2011	11:01:52 PM	Run finished at 11:01 PM
3/18/2011	11:01:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/18/2011	11:02:39 PM	Recipe started at 11:02 PM
3/18/2011	11:02:39 PM	Helium valve closed
3/18/2011	11:02:39 PM	BCl3 valve closed
3/18/2011	11:02:39 PM	PH3 valve closed
3/18/2011	11:02:39 PM	SiCl4 pre valve closed
3/18/2011	11:02:39 PM	SiCl4 post valve closed
3/18/2011	11:02:39 PM	Main Vac valve closed
3/18/2011	11:02:39 PM	Bypass valve closed
3/18/2011	11:02:39 PM	Bubbler valve closed
3/18/2011	11:02:39 PM	H2 valve opened
3/18/2011	11:02:39 PM	Helium MFC set to  0.000000
3/18/2011	11:02:39 PM	H2 MFC set to  500.000000
3/18/2011	11:02:39 PM	BCl3 MFC set to  0.000000
3/18/2011	11:02:39 PM	PHl3 MFC set to  0.000000
3/18/2011	11:02:39 PM	SiCl4 MFC set to  0.000000
3/18/2011	11:02:39 PM	Bypass solenoid MFC set to  0.000000
3/18/2011	11:02:39 PM	Tube furnace set to 0
3/18/2011	11:03:58 PM	Helium valve closed
3/18/2011	11:03:58 PM	BCl3 valve closed
3/18/2011	11:03:58 PM	PH3 valve closed
3/18/2011	11:03:58 PM	SiCl4 pre valve closed
3/18/2011	11:03:58 PM	SiCl4 post valve closed
3/18/2011	11:03:58 PM	Main Vac valve closed
3/18/2011	11:03:58 PM	Bypass valve closed
3/18/2011	11:03:58 PM	H2 valve opened
3/18/2011	11:03:58 PM	Bubbler valve opened
3/18/2011	11:03:58 PM	Helium MFC set to  0.000000
3/18/2011	11:03:58 PM	H2 MFC set to  500.000000
3/18/2011	11:03:58 PM	BCl3 MFC set to  0.000000
3/18/2011	11:03:58 PM	PHl3 MFC set to  0.000000
3/18/2011	11:03:58 PM	SiCl4 MFC set to  0.000000
3/18/2011	11:03:58 PM	Bypass solenoid MFC set to  0.000000
3/18/2011	11:03:58 PM	Tube furnace set to 1000
3/18/2011	11:23:58 PM	Helium valve closed
3/18/2011	11:23:58 PM	PH3 valve closed
3/18/2011	11:23:58 PM	Main Vac valve closed
3/18/2011	11:23:58 PM	Bypass valve closed
3/18/2011	11:23:58 PM	H2 valve opened
3/18/2011	11:23:58 PM	BCl3 valve opened
3/18/2011	11:23:58 PM	SiCl4 pre valve opened
3/18/2011	11:23:58 PM	SiCl4 post valve opened
3/18/2011	11:23:58 PM	Bubbler valve opened
3/18/2011	11:23:58 PM	Helium MFC set to  0.000000
3/18/2011	11:23:58 PM	H2 MFC set to  500.000000
3/18/2011	11:23:58 PM	BCl3 MFC set to  3.000000
3/18/2011	11:23:58 PM	PHl3 MFC set to  0.000000
3/18/2011	11:23:58 PM	SiCl4 MFC set to  75.000000
3/18/2011	11:23:58 PM	Bypass solenoid MFC set to  0.000000
3/18/2011	11:23:58 PM	Tube furnace set to 1000
3/18/2011	11:43:58 PM	H2 valve closed
3/18/2011	11:43:58 PM	BCl3 valve closed
3/18/2011	11:43:58 PM	PH3 valve closed
3/18/2011	11:43:58 PM	SiCl4 pre valve closed
3/18/2011	11:43:58 PM	SiCl4 post valve closed
3/18/2011	11:43:58 PM	Main Vac valve closed
3/18/2011	11:43:58 PM	Bypass valve closed
3/18/2011	11:43:58 PM	Helium valve opened
3/18/2011	11:43:58 PM	Bubbler valve opened
3/18/2011	11:43:58 PM	Helium MFC set to  500.000000
3/18/2011	11:43:58 PM	H2 MFC set to  0.000000
3/18/2011	11:43:58 PM	BCl3 MFC set to  0.000000
3/18/2011	11:43:58 PM	PHl3 MFC set to  0.000000
3/18/2011	11:43:58 PM	SiCl4 MFC set to  0.000000
3/18/2011	11:43:58 PM	Bypass solenoid MFC set to  0.000000
3/18/2011	11:43:58 PM	Tube furnace set to 0
